Diaphragm of MEMS electroacoustic transducer
US8553911B2 · kind B2 · utility
6Cited by
21References
3Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 1, 2012 |
| Grant date | Oct 8, 2013 |
| Priority date | — |
| Expiry date | Nov 1, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R19/04
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A diaphragm of an MEMS electroacoustic transducer including a first axis-symmetrical pattern layer is provided. Because the layout of the first axis-symmetrical pattern layer can match the pattern of the sound wave, the vibration uniformity of the diaphragm can be improved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.