Device for storing substrates

US8554358B2 · kind B2 · utility

Assignee

• TEC-SEM AG · CH

Inventors

• Erich Jager · Bad Marienberg, DE
• Christian Balg · Kreuzlingen, CH

Key dates

• Filing date: Jul 6, 2006
• Grant date: Oct 8, 2013
• Expiry date: Jan 1, 2029

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67769
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

The invention relates to a device for storing platelike substrates, particularly wafers or test wafers, like those, in particular, used for manufacturing electronic components. The aim of the invention is to make a reliable access to the substrates possible even when storage elements, which can be separated from one another, of the device are affected by manufacturing mistakes. For such a device that, for each substrate, has a number of storage elements, which follow one another in a direction of stacking and which can move relative to one another, in which the storage elements have a stacking area, which is provided for placing the respective storage element inside a stack of storage elements, compensating means are therefore provided in order to compensate for stacking errors in the direction of stacking.