TEC-SEM AG
6Patents
2Active
6Granted
32Portfolio score
Filing activity: Jul 14, 1997 → Jul 20, 2007 · 2 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6540468B1 | Device and method for handling individual wafers | Emerging Cross-Sectional Technologies | 18 | Expired |
| US5975825A | Transfer apparatus for wafers | Emerging Cross-Sectional Technologies | 5 | Expired |
| US7682455B2 | Device for storing and/or transporting plate-shaped substrates in the manufacture of electronic components | Electricity | 2 | Expired |
| US8554358B2 | Device for storing substrates | Electricity | 1 | Active |
| US7287951B2 | Device and method for the harmonized positioning of wafer disks | Emerging Cross-Sectional Technologies | 1 | Expired |
| US9230838B2 | Apparatus for storage of objects from the field of manufacture of electronic components | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.