MEMS device with enhanced resistance to stiction
US8555720B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 24, 2011 |
| Grant date | Oct 15, 2013 |
| Priority date | — |
| Expiry date | Dec 8, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0871
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS device (20) includes a substrate (24) and a movable element (22) adapted for motion relative to the substrate (24). A secondary structure (46) extends from the movable element (22). The secondary structure (46) includes a secondary mass (54) and a spring (56) interconnected between the movable element (22) and the mass (54). The spring (56) is sufficiently stiff to prevent movement of the mass (54) when the movable element (22) is subjected to force within a sensing range of the device (20). When the device (20) is subjected to mechanical shock (66), the spring (56) deflects so that the mass (54) moves counter to the motion of the movable element (22). Movement of the mass (54) causes the movable element (22) to vibrate to mitigate stiction between the movable element (22) and other structures of the device (20) and/or to prevent breakage of components within the device (22).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.