Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers
US8557128B2 · kind B2 · utility
19Cited by
153References
32Claims
0Family size
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Key dates
| Filing date | Mar 22, 2007 |
| Grant date | Oct 15, 2013 |
| Priority date | — |
| Expiry date | Mar 22, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24802
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Methods for fabricating sub-lithographic, nanoscale microchannels utilizing an aqueous emulsion of an amphiphilic agent and a water-soluble, hydrogel-forming polymer, and films and devices formed from these methods are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.