Microengineered multipole rod assembly
US8558167B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 22, 2011 |
| Grant date | Oct 15, 2013 |
| Priority date | — |
| Expiry date | May 13, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/4225
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of mounting rods in quadrupole, hexapole, octupole, and other multipole geometries is described. First and second dies are used to hold the rods in the required configuration with the plurality of rods extending through each of the two dies. A coupling arrangement is used to separate the first and second dies, and also prevents motion in the plane of the dies. The rods are seated and retained against individual supports and arranged circumferentially about an intended ion beam axis. The supports are desirably fabricated from silicon bonded to a glass substrate, a support for a first rod being electrically isolated from a support for a second adjacent rod.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.