Method for manufacturing solid-state thermal neutron detectors with simultaneous high thermal neutron detection efficiency (>50%) and neutron to gamma discrimination (>1.0E4)
US8558188B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 25, 2012 |
| Grant date | Oct 15, 2013 |
| Priority date | — |
| Expiry date | Apr 25, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01T3/08
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
Methods for manufacturing solid-state thermal neutron detectors with simultaneous high thermal neutron detection efficiency (>50%) and neutron to gamma discrimination (>104) are provided. A structure is provided that includes a p+ region on a first side of an intrinsic region and an n+ region on a second side of the intrinsic region. The thickness of the intrinsic region is minimized to achieve a desired gamma discrimination factor of at least 1.0E+04. Material is removed from one of the p+ region or the n+ region and into the intrinsic layer to produce pillars with open space between each pillar. The open space is filed with a neutron sensitive material. An electrode is placed in contact with the pillars and another electrode is placed in contact with the side that is opposite of the intrinsic layer with respect to the first electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.