Patent · US Active

Semiconductor device and method for manufacturing semiconductor device

US8558244B2 · kind B2 · utility

2Cited by
1References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 4, 2011
Grant dateOct 15, 2013
Priority date
Expiry dateJul 19, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/111
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

According to one embodiment, a semiconductor device includes a SiC layer of a first conductivity type, a SiC region of a second conductivity type, and a conductive layer of the second conductivity type. The SiC layer of the first conductivity type has a hexagonal crystal structure. The SiC region of the second conductivity type is formed in a surface of the SiC layer. The conductive layer of the second conductivity type is provided on the SiC region and is in contact with a portion of the SiC region including SiC of a cubic crystal structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.