Patent · US Active

Imaging apparatus and imaging method

US8559594B2 · kind B2 · utility

32Cited by
1References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 12, 2011
Grant dateOct 15, 2013
Priority date
Expiry dateApr 26, 2032

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2223/401
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An imaging apparatus analyzes a periodic pattern of a Moiré due to Talbot interference by the Fourier transform method and forms an image. The imaging apparatus includes a first grating having a structure that transmits light beams from a beam source to refract or diffract the light beams and forms a self image based on a first periodic pattern by the Talbot interference at a predetermined position; a second grating that absorbs part of the first periodic pattern and causes a Moiré to be generated based on a second periodic pattern when the second grating is arranged at a position at which the self image is formed. All cross sections of the Moiré with axes in differential directions of a wavefront for the analysis by the Fourier transform method have a two-dimensional periodic structure in which periods of patterns in the second periodic pattern are the same.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.