Dual sided workpiece handling
US8563407B2 · kind B2 · utility
2Cited by
18References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 4, 2010 |
| Grant date | Oct 22, 2013 |
| Priority date | — |
| Expiry date | Nov 25, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/84
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method includes positioning at least one dual sided workpiece on an assembly in a process chamber to expose a first side of the at least one dual sided workpiece, treating the first side of the at least one dual sided workpiece, reorienting a portion of the assembly in the process chamber to expose a second side of the at least one dual sided workpiece, the second side opposing the first side, and treating the second side. A processing apparatus including a process chamber defining an enclosed volume and a dual sided workpiece assembly disposed in the enclosed volume is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.