Patent · US Active

Piezo-resistive MEMS resonator

US8569934B2 · kind B2 · utility

2Cited by

1References

12Claims

0Family size

Assignee

NXP B.V. · NL

Inventors

Gerhard Koops · Aalst, BE
Jozef Thomas Martinus van Beek · Rosmalen, NL

Key dates

Filing date	Dec 23, 2010
Grant date	Oct 29, 2013
Priority date	—
Expiry date	Mar 17, 2031

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/42
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

A piezo-resistive MEMS resonator comprising an anchor, a resonator mounted on the anchor, an actuator mounted to apply an electrostatic force on the resonator and a piezo-resistive read-out means comprising a nanowire coupled to the resonator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.