Patent · US Active

Acceleration sensor having an electrode bridge

US8573059B2 · kind B2 · utility

0Cited by

0References

3Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Arnd Kaelberer · Neckargemünd, DE
Lars Tebje · Reutlingen, DE
Christian Bierhoff · Reutlingen, DE

Key dates

Filing date	Aug 4, 2009
Grant date	Nov 5, 2013
Priority date	—
Expiry date	May 7, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG01P15/0802
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A capacitive micromechanical acceleration sensor has a substrate and a micromechanical functional layer situated above the substrate. A seismic mass, a suspension and fixed electrodes are situated in the micromechanical functional layer. The fixed electrodes are electrically connected to one another on a first and second side, respectively, of the suspension using buried conductor tracks. The fixed electrodes are connected to one another between the first and second side of the suspension using first and second conductors in the micromechanical functional layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.