Power distortion-based servo control systems for frequency tuning RF power sources
US8576013B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 29, 2011 |
| Grant date | Nov 5, 2013 |
| Priority date | — |
| Expiry date | Dec 29, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03F3/191
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A radio frequency system includes a power amplifier that outputs a radio frequency signal to a matching network via a transmission line between the power amplifier and the matching network. A sensor monitors the radio frequency signal and generates first sensor signals based on the radio frequency signal. A distortion module determines a first distortion value according to at least one of (i) a sinusoidal function of the first sensor signals and (ii) a cross-correlation function of the first sensor signals. A first correction circuit (i) generates a first impedance tuning value based on the first distortion value and a first predetermined value, and (ii) provides feedforward control of impedance matching performed within the matching network including outputting the first impedance tuning value to one of the power amplifier and the matching network.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.