Target supply apparatus, control system, control apparatus and control circuit thereof
US8581220B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Dec 23, 2009 |
| Grant date | Nov 12, 2013 |
| Priority date | — |
| Expiry date | Jul 26, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05G2/0082
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A target supply apparatus includes a tank for storing a liquid target material, a nozzle for outputting the liquid target material in the tank, and a gas supply source for supplying gas into the tank, and controls a gas pressure inside the tank with a pressure of the gas supplied from the gas supply source which is provided with a pressure regulator. The target supply apparatus also includes a pressure-decrease gas passage of which one end is connected to the tank and the other end forms an exhaust port, a pressure-decrease valve provided on the pressure-decrease gas passage, and a controller for controlling open/close of the pressure-decrease valve. The controller, when the target material is caused not to output from the nozzle, opens the pressure-decrease valve and decreases the pressure inside the tank.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.