Patent · US Active

Device for the low-deformation replaceable mounting of an optical element

US8582081B2 · kind B2 · utility

1Cited by

21References

12Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Franz Sorg · Aalen, DE
Andreas Wurmbrand · Aalen, DE
Thomas Petasch · Aalen, DE
Dirk Schaffer · Jena, DE
Siegfried Wahl · Donzdorf, DE

Key dates

Filing date	Nov 20, 2008
Grant date	Nov 12, 2013
Priority date	—
Expiry date	Sep 6, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70825
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The invention relates to a device for the low-deformation replaceable mounting of an optical element, in particular a closure plate of an objective of a projection exposure system for microlithography for the production of semiconductor components, in a mount (12). The optical element is connected to the mount (12) at least partly via an adhesive connection. This is located between the adjacent circumferential walls of mount (12) and optical element. The mount (12) is provided with at least three support feet (14) distributed over the circumference, by means of which the optical element is mounted laterally and axially. The mount (12) is connected to the housing of the objective in an at least approximately deformation-decoupled manner via three mount bearing points (15).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.