Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device
US8582113B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 10, 2012 |
| Grant date | Nov 12, 2013 |
| Priority date | — |
| Expiry date | Aug 10, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70616
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for determining the position of a structure on an object in relation to a coordinate system is disclosed. The object is placed on a measuring table which is movable in one plane, wherein a block defines the plane. At least one optical arrangement is provided for transmitted light illumination and/or reflected light illumination. The optical arrangement comprises an illumination apparatus for reflected light illumination and/or transmitted light illumination and at least one first or second optical element, wherein at least part of the at least one optical element extends into the space between the block and an optical system support. At least one encapsulation is provided, encapsulating at least one optical component of at least one optical arrangement and/or at least one optical element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.