UV lamp assembly of degas chamber having rotary shutters
US8584612B2 · kind B2 · utility
12Cited by
48References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 17, 2009 |
| Grant date | Nov 19, 2013 |
| Priority date | — |
| Expiry date | Nov 18, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02041
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A UV lamp assembly having rotary shutters. Each rotary shutter has a concave wall with a reflective concave surface. The rotary shutters can be collectively rotated between an open position and an closed position. At the open position, the rotary shutters do not block UV light of UV lamps from leaving the UV lamp assembly while at the closed position the rotary shutters block UV light from leaving the UV lamp assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.