Device and method for coating a micro- and/or nano-structured structural substrate and coated structural substrate
US8586132B2 · kind B2 · utility
3Cited by
23References
19Claims
0Family size
Inventor
Key dates
| Filing date | Feb 7, 2012 |
| Grant date | Nov 19, 2013 |
| Priority date | — |
| Expiry date | Feb 7, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24355
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The present invention relates to a device and a method for coating a microstructured and/or nanostructured structured substrate. According to the present invention, the coating is performed in a vacuum chamber. The pressure level in the vacuum chamber is elevated during or after the charging of the vacuum chamber with coating substance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.