Method and apparatus for producing small structures
US8586142B2 · kind B2 · utility
3Cited by
2References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 21, 2007 |
| Grant date | Nov 19, 2013 |
| Priority date | — |
| Expiry date | Apr 14, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24802
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention relates to a method for producing small structures includes: depositing a mask on a surface of a substrate; and evaporating a source material under such evaporation condition performed at such pressure to form a layer onto both a shadowed surface area and a non-shadowed surface area of the mask and the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.