Michael Himmelhaus
8Patents
3h-index
13Co-inventors
50Inventor score
Filing activity: Dec 20, 2001 → Jul 20, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6756014B2 | Biochemical sensor and biochemical testing system using the same | Emerging Cross-Sectional Technologies | 9 | Expired |
| US8502972B2 | Clusters of microresonators for cavity mode optical sensing | Physics | 5 | Active |
| US8586142B2 | Method and apparatus for producing small structures | Emerging Cross-Sectional Technologies | 3 | Active |
| US8471217B2 | Fluorescent non-metallic particles encapsulated in a metallic coating | Physics | 3 | Active |
| US10429731B2 | Method and device for generating a reference image in the characterization of a mask for microlithography | Physics | 0 | Active |
| US10599936B2 | Method for correcting the distortion of a first imaging optical unit of a first measurement system | Physics | 0 | Active |
| US9785058B2 | Method for ascertaining distortion properties of an optical system in a measurement system for microlithography | Physics | 0 | Active |
| US8288166B2 | Sensor chip with connected non-metallic particles comprising a metallic coating | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.