Chromatic point sensor configuration including real time spectrum compensation
US8587772B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2011 |
| Grant date | Nov 19, 2013 |
| Priority date | — |
| Expiry date | Jun 11, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2210/50
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A chromatic point sensor system configured to compensate for potential errors due to workpiece material effects comprises a first confocal optical path including a longitudinally dispersive element configured to focus different wavelengths at different distances proximate to a workpiece; a second optical path configured to focus different wavelengths at substantially the same distance proximate to the workpiece; a light source connected to the first confocal optical path; a light source connected to the second optical path; a first confocal optical path disabling element; a second optical path disabling element; and a CPS electronics comprising a CPS wavelength detector which provides output spectral profile data. The output spectral profile data from the second optical path is usable to compensate output spectral profile data from the first confocal optical path for a distance-independent profile component that includes errors due to workpiece material effects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.