Patent · US Active

Evaporator for organic materials and method for evaporating organic materials

US8591223B2 · kind B2 · utility

9Cited by

3References

18Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Stefan Hein · Berlin, DE
Gerd Hoffmann · Bruchköbel, DE
Peter Skuk · Nidderau, DE

Key dates

Filing date	Sep 30, 2008
Grant date	Nov 26, 2013
Priority date	—
Expiry date	Dec 13, 2031

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/243
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

An evaporator for vaporizing an organic material to be deposited on a flexible substrate where the evaporator includes an evaporation tube having a wall encompassing a cavity for vaporizing the organic material, at least one heating device arranged adjacent to the wall and being adapted to heat the evaporation tube, and at least one nozzle assembly protruding from the evaporation tube. The nozzle assembly further comprises a nozzle cover with an opening, and a shutter for selectively opening and closing the opening of the nozzle cover. The shutter is adapted to have in operation of the evaporation tube a temperature within a shutter temperature range of 140° C. such that the temperature of the nozzle cover is within the shutter temperature range.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.