Sealing structure and method of manufacturing the same

US8592228B2 · kind B2 · utility

Assignee

• NXP B.V. · NL

Inventors

• Johannes Josephus Theodorus Marinus Donkers · Valkenswaard, NL
• Erwin Hijzen · Blanden, BE
• Philippe Meunier-Beillard · Steenokkerzeel, BE
• Gerhard Koops · Aalst, BE

Key dates

• Filing date: Nov 15, 2007
• Grant date: Nov 26, 2013
• Expiry date: May 1, 2029

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2203/0145
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A method of manufacturing a structure (1100), the method comprising forming a cap element (401) on a substrate (101), removing material (103) of the substrate (101) below the cap element (401) to thereby form a gap (802) between the cap element (401) and the substrate (101), and rearranging material of the cap element (401) and/or of the substrate (101) to thereby merge the cap element (401) and the substrate (101) to bridge the gap (802).