Patent · US Active

Fabrication of large-area hexagonal boron nitride thin films

US8592291B2 · kind B2 · utility

24Cited by

2References

20Claims

0Family size

Assignee

Massachusetts Institute of Technology · US

Inventors

Yumeng Shi · Cambridge, US
Jing Kong · Winchester, US
Christoph Hamsen · Hamm, DE
Lain-Jong Li · Hsinchu, TW

Key dates

Filing date	Apr 7, 2011
Grant date	Nov 26, 2013
Priority date	—
Expiry date	Jan 2, 2032

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T428/265
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A hexagonal boron nitride thin film is grown on a metal surface of a growth substrate and then annealed. The hexagonal boron nitride thin film is coated with a protective support layer and released from the metal surface. The boron nitride thin film together with the protective support layer can then be transferred to any of a variety of arbitrary substrates.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.