Patent · US Active

Ion beam sample preparation apparatus and methods

US8592763B2 · kind B2 · utility

1Cited by

14References

4Claims

0Family size

Assignee

GATAN, INC. · US

Inventors

Steven Thomas Coyle · Alameda, US
John Andrew Hunt · Fremont, US

Key dates

Filing date	Aug 30, 2012
Grant date	Nov 26, 2013
Priority date	—
Expiry date	Aug 30, 2032

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/3118
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises a tilting ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The tilting ion beam irradiating means may direct ions at the sample from more than one tilt angle. A rotating shield retention stage is also disclosed which works in concert with the tilting ion beam irradiating means.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.