Steven Thomas Coyle
25Patents
7h-index
29Co-inventors
65Inventor score
Filing activity: Jul 29, 1999 → Oct 13, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6429443B1 | Multiple beam electron beam lithography system | Electricity | 87 | Expired |
| US7015467B2 | Generating electrons with an activated photocathode | Electricity | 57 | Expired |
| US7446474B2 | Hetero-junction electron emitter with Group III nitride and activated alkali halide | Electricity | 43 | Active |
| US6724002B2 | Multiple electron beam lithography system with multiple beam modulated laser illumination | Electricity | 25 | Expired |
| US6376984B1 | Patterned heat conducting photocathode for electron beam source | Electricity | 11 | Expired |
| US7301263B2 | Multiple electron beam system with electron transmission gates | Electricity | 9 | Expired |
| US6759800B1 | Diamond supported photocathodes for electron sources | Performing Operations; Transporting | 9 | Expired |
| US7161162B2 | Electron beam pattern generator with photocathode comprising low work function cesium halide | Electricity | 7 | Expired |
| US7372195B2 | Electron beam source having an extraction electrode provided with a magnetic disk element | Electricity | 6 | Expired |
| US8283642B2 | Ion beam sample preparation apparatus and methods | Electricity | 5 | Active |
| US7427765B2 | Electron beam column for writing shaped electron beams | Electricity | 5 | Expired |
| US6399934B1 | Optical coupling to gated photocathodes | Electricity | 5 | Expired |
| US8445874B2 | Ion beam sample preparation apparatus and methods | Electricity | 4 | Active |
| US8384050B2 | Ion beam sample preparation thermal management apparatus and methods | Electricity | 4 | Active |
| US7800075B2 | Multi-function module for an electron beam column | Electricity | 3 | Active |
| US8791438B2 | Ion beam sample preparation apparatus and methods | Electricity | 1 | Active |
| US8592763B2 | Ion beam sample preparation apparatus and methods | Electricity | 1 | Active |
| US10110854B2 | Ion beam sample preparation apparatus and methods | Electricity | 1 | Active |
| US10731246B2 | Ion beam sample preparation and coating apparatus and methods | Electricity | 0 | Active |
| US8729510B2 | Ion beam sample preparation apparatus and methods | Electricity | 0 | Active |
| US11004656B2 | Methods and apparatus for determining, using, and indicating ion beam working properties | Electricity | 0 | Active |
| US6847164B2 | Current-stabilizing illumination of photocathode electron beam source | Electricity | 0 | Expired |
| US9196455B2 | Ion beam sample preparation apparatus and methods | Electricity | 0 | Active |
| US8653489B2 | Ion beam sample preparation apparatus and methods | Electricity | 0 | Active |
| US8610090B2 | Ion beam sample preparation thermal management apparatus and methods | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.