High-efficiency MEMS micro-vibrational energy harvester and process for manufacturing same
US8593036B2 · kind B2 · utility
13Cited by
17References
25Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 18, 2011 |
| Grant date | Nov 26, 2013 |
| Priority date | — |
| Expiry date | Aug 28, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention relates generally to a High Efficiency MEMS Micro-Vibrational Energy Harvester (μVEH) having a thick beam bimorph architecture. The disclosed architecture is capable of producing a voltage of sufficient magnitude such that the requirement to connect a plurality of harvesters in series to produce an adequate voltage magnitude is eliminated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.