Refractive index measuring apparatus
US8593624B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 21, 2010 |
| Grant date | Nov 26, 2013 |
| Priority date | — |
| Expiry date | May 20, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M11/0228
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
By using two probe optical systems for measurement by disposing the probe optical systems with a test object sandwiched therebetween, an optical path length of light transmitted through the test object which is identified locally is calculated using an interference signal thereof. In addition, a geometrical thickness of the same part is calculated by measuring positions of the probe optical systems, whereby two calculated values are obtained. Based on the values and a calculated value for a reference object, a refractive index distribution of the test object is obtained.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.