Grazing incidence collector optical systems for EUV and X-ray applications
US8594277B2 · kind B2 · utility
2Cited by
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12Claims
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Key dates
| Filing date | Jan 28, 2009 |
| Grant date | Nov 26, 2013 |
| Priority date | — |
| Expiry date | Apr 14, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K2201/064
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A collector optical system for EUV and X-ray applications is disclosed, wherein the system includes a plurality of mirrors arranged in a nested configuration that is symmetric about an optical axis. The mirrors have first and second reflective surfaces that provide successive grazing incidence reflections of radiation from a radiation source. The first and second reflective surfaces have a corrective shape that compensates for high spatial frequency variations in the far field intensity distribution of the radiation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.