Patent · US Active

Method and apparatus for alignment optimization with respect to plurality of layers for writing different layers with different machine configurations

US8594825B2 · kind B2 · utility

4Cited by

4References

20Claims

0Family size

Assignee

MICRONIC MYDATA AB · SE

Inventors

Mikael Wahlsten · Stockholm, SE
Per Gustafsson · Bjärred, SE
Thomas Öström · Stockholm, SE

Key dates

Filing date	Feb 28, 2011
Grant date	Nov 26, 2013
Priority date	—
Expiry date	Aug 25, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH05K3/4679
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method of patterning a plurality of layers of a work piece in a series of write machines, wherein errors due to different transformation capabilities of different machines are compensated by distributing the errors over the plurality of layers.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.