Inductively coupled plasma reactor with multiple magnetic cores
US8597464B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 19, 2007 |
| Grant date | Dec 3, 2013 |
| Priority date | — |
| Expiry date | Nov 2, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32357
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
There is provided an inductively coupled plasma reactor. The inductively coupled plasma reactor is connected to a transformer with multiple magnetic cores and a primary winding, to transfer an electromotive force for plasma discharge to a plasma discharge chamber of a reactor body. Parts of magnetic core positioned in side the plasma discharge chamber are protected by being entirely covered by a core protecting tube. The primary winding is electrically connected to a power supply source providing radio frequency power. In the inductively coupled plasma reactor, since a number of magnetic core cross sectional parts are positioned inside the plasma discharge chamber, the efficiency of transferring the inductively coupled energy to be connected with plasma is very high.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.