Scanning transmission electron microscopy
US8598527B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 22, 2011 |
| Grant date | Dec 3, 2013 |
| Priority date | — |
| Expiry date | Mar 8, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/143
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A scanning transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam to a probe, such as for example a longitudinally stretched probe. A stage is provided to hold a specimen in the path of the electron beam. The specimen may include one or more elongated objects, such as for example polymers to be sequenced. A beam scanner scans the electron beam across the specimen. A controller may define one or more scanning areas corresponding to the locations of the elongated objects, and control one or more of the beam scanner and stage to selectively scan the electron beam probe in the scanning areas. The controller may also tune the beam optics during imaging. One or more detectors are provided to detect electrons transmitted through the specimen to generate an image for each of the scanning areas. The controller may also analyze the one or more images to determine information regarding the specimen, such as for example to sequence a polymer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.