Patent · US Active

Electrostatic end effector apparatus, systems and methods

US8599531B2 · kind B2 · utility

12Cited by

3References

25Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Satish Sundar · San Jose, US
Jeffrey C. Hudgens · San Francisco, US
Prudhvi R. Chintalapati · Milpitas, US
William Taylor · Dublin, US
William P. Laceky · Georgetown, US
Jeffrey A. Brodine · Los Gatos, US
Dean C. Hruzek · Cedar Park, US
Mario D. Silvetti · معلمی نژاد, US

Key dates

Filing date	Jan 8, 2010
Grant date	Dec 3, 2013
Priority date	—
Expiry date	Oct 5, 2032

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S901/40
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

Systems, apparatus and methods for transporting substrates between system components of an electronic device manufacturing system are provided. The systems and apparatus include an electrostatic end effector having a base, an electrode pair on the base, and spacer members for spacing the substrate from the electrode pairs to provide a gap between the electrode pair and the substrate. Methods of the invention as well as numerous other aspects are provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.