Substrate processing apparatus
US8600539B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 25, 2007 |
| Grant date | Dec 3, 2013 |
| Priority date | — |
| Expiry date | Oct 3, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/45031
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A substrate processing apparatus which can securely show the status of recipe transition is provided. In a substrate processing apparatus 100 including a main control unit 312 which sends a control instruction to process a substrate, and a sub control unit 314 which carries out control of the apparatus in accordance with the control instruction from main control unit 312, the main control unit 312 has a memory unit 317 which stores plural recipes, a display control unit 336 which accepts an execution instruction to cause an arbitrary recipe of the plural recipes to be executed, and a display unit 334 which displays the arbitrary recipe designated by the display control unit 336, on an operation screen 308. When an execution instruction to cause another recipe stored in the recipe storage means to be executed is received during the execution of the arbitrary recipe, the arbitrary recipe and this another recipe are displayed on the operation screen 308 together with a factor which has generated the execution instruction to cause this another recipe to be executed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.