Recirculating filtration systems for material processing systems and associated methods of use and manufacture
US8603217B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 1, 2011 |
| Grant date | Dec 10, 2013 |
| Priority date | — |
| Expiry date | Mar 3, 2031 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2253/102
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Embodiments of recirculating filtration and exhaust systems for material processing systems are disclosed herein. A material processing system configured in accordance with one embodiment includes an enclosure for processing a workpiece, the enclosure having an enclosure inlet and an enclosure outlet. The system also includes a first flow path fluidly coupled to the enclosure inlet and the enclosure outlet, and a first filtration assembly in the first flow path. The first filtration assembly draws airflow from the enclosure and returns the airflow to the enclosure. The system further includes a second flow path in fluid communication with the first flow path upstream from the enclosure inlet, and a second filtration assembly in the second flow path. The second filtration assembly draws airflow from the first flow path and returns airflow to the first flow path.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.