Physical quantity detection device and method for manufacturing the same
US8604565B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 11, 2011 |
| Grant date | Dec 10, 2013 |
| Priority date | — |
| Expiry date | Aug 31, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A physical quantity detection device includes: an insulating layer; a semiconductor layer on the insulating layer; and first and second electrodes in the semiconductor layer. Each electrode has a wall part, one of which includes two diaphragms and a cover part. The diaphragms facing each other provide a hollow cylinder having an opening covered by the cover part. One diaphragm faces the other wall part or one diaphragm in the other wall part. A distance between the one diaphragm and the other wall part or the one diaphragm in the other wall part is changed with pressure difference between reference pressure in the hollow cylinder and pressure of an outside when a physical quantity is applied to the diaphragms. The physical quantity is detected by a capacitance between the first and second electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.