Drive method for starting and operating a resonant scanning MEMS device at its resonant frequency
US8606410B2 · kind B2 · utility
1Cited by
14References
23Claims
0Family size
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Key dates
| Filing date | Jun 29, 2010 |
| Grant date | Dec 10, 2013 |
| Priority date | — |
| Expiry date | Apr 26, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/105
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The resonance frequency of a forced torsionally oscillating mirror MEMS device can be controlled in the presence of perturbations by means of a closed loop feedback device and method of using it. The method is implemented through a simple algorithm, implemented in either software or hardware, that maintains the condition of resonance, or another selected frequency, by recursively determining that the center of the driving voltage pulse is positioned at a point on the measured positional waveform of the oscillating system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.