Patent · US Active

Contour alignment for model calibration

US8607168B2 · kind B2 · utility

1Cited by

0References

25Claims

0Family size

Assignee

MENTOR GRAPHICS CORPORATION · US

Inventors

Ir Kusnadi · San Jose, US
Thuy Q Do · San Jose, US
Yuri Granik · Palo Alto, US
John L. Sturtevant · Portland, US

Key dates

Filing date	Apr 22, 2011
Grant date	Dec 10, 2013
Priority date	—
Expiry date	Jul 15, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70516
WIPO fieldOptics
WIPO sectorInstruments

Abstract

Techniques for model calibration and alignment of measurement contours of printed layout features with simulation contours obtained with a model are disclosed. With various implementations of the invention, contour point errors are determined. Based on the contour point errors and a cost function, values of alignment parameters may be determined. The values of alignment parameters may be used to realign the measurement contours for model calibration. The alignment may be conducted concurrently with model calibration.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.