Patent · US Active

Salt and photoresist composition containing the same

US8609317B2 · kind B2 · utility

4Cited by
7References
7Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 9, 2010
Grant dateDec 17, 2013
Priority date—
Expiry dateOct 7, 2031

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S430/123
  • WIPO fieldOrganic fine chemistry
  • WIPO sectorChemistry

Abstract

A salt represented by the formula (I—Pb):

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.