Ion beam sample preparation thermal management apparatus and methods
US8610090B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 29, 2012 |
| Grant date | Dec 17, 2013 |
| Priority date | — |
| Expiry date | Dec 29, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3118
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed are embodiments of an ion beam shield for use in an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The ion beam shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.