MEMS device with central anchor for stress isolation

US8610222B2 · kind B2 · utility

Assignee

• Freeescale Semiconductor, Inc. · US

Inventors

• Yizhen Lin · Cohoes, US
• Gary Li · Mountain View, US
• Andrew C. McNeil · Chandler, US
• Todd F. Miller · Scottsdale, US
• Lisa Z. Zhang · Gilbert, US

Key dates

• Filing date: Apr 18, 2011
• Grant date: Dec 17, 2013
• Expiry date: Apr 13, 2032

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/0307
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A MEMS device (20) includes a proof mass (32) coupled to and surrounding an immovable structure (30). The immovable structure (30) includes fixed fingers (36, 38) extending outwardly from a body (34) of the structure (30). The proof mass (32) includes movable fingers (60), each of which is disposed between a pair (62) of the fixed fingers (36, 38). A central area (42) of the body (34) is coupled to an underlying substrate (24), with the remainder of the immovable structure (30) and the proof mass (32) being suspended above the substrate (24) to largely isolate the MEMS device (20) from package stress, Additionally, the MEMS device (20) includes isolation trenches (80) and interconnects (46, 50, 64) so that the fixed fingers (36), the fixed fingers (38), and the movable fingers (60) are electrically isolated from one another to yield a differential device configuration.