Metal e-fuse with intermetallic compound programming mechanism and methods of making same

US8610243B2 · kind B2 · utility

Assignee

• GlobalFoundries Inc. · KY

Inventors

• Jens Poppe · Radebeul, DE
• Andreas Kurz · Oberursel, DE

Key dates

• Filing date: Dec 9, 2011
• Grant date: Dec 17, 2013
• Expiry date: Dec 9, 2031

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/0002
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Disclosed herein is a metal e-fuse device that employs an intermetallic compound programming mechanism and various methods of making such an e-fuse device. In one example, a device disclosed herein includes a first metal line, a second metal line and a fuse element that is positioned between and conductively coupled to each of the first and second metal lines, wherein the fuse element is adapted to be blown by passing a programming current therethrough, and wherein the fuse element is comprised of a material that is different from a material of construction of at least one of the first and second metal lines.