Micro-electromechanical device
US8610997B2 · kind B2 · utility
Inventor
Key dates
| Filing date | Oct 22, 2011 |
| Grant date | Dec 17, 2013 |
| Priority date | — |
| Expiry date | Nov 1, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/06
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
As for the method that modulates optical path length by the position of reflection plane of light, the movement of the position-movable plate in micrometer-size electromechanical device can be restricted by the stopping plates placed above and below the edge of the position-movable plate, the distance between the stopping plates may be set depending on the desired amount in modulating the optical path length. The voltage differential in the device is operable to create electrostatic attraction, to perform transition movement of the position-movable plate between the stopping plates, the light reflector connected to the position-movable plate takes at least two states in positioning, enabling to modulate the optical path length of reflected light by the light reflector with high reproducibility and high accuracy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.