Substrate loader and unloader having a Bernoulli support
US8613474B2 · kind B2 · utility
4Cited by
22References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 24, 2011 |
| Grant date | Dec 24, 2013 |
| Priority date | — |
| Expiry date | Dec 22, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68785
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate chuck includes a frame forming a support adapted to support an adhering surface thereon, and a Bernoulli chuck surface coupled to the frame and adapted to support the substrate. The Bernoulli chuck surface is axially moveable relative to the support between first and second positions. In the first position, the substrate is coupled to the adhering surface, and the substrate is separated from the adhering surface with movement of the Bernoulli chuck from the first position to the second position, without contact between the substrate and the Bernoulli chuck surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.