Patent · US Active

Pattern generators, calibration systems and methods for patterning workpieces

US8614798B2 · kind B2 · utility

0Cited by

11References

22Claims

0Family size

Assignee

MICRONIC MYDATA AB · SE

Inventors

Anders Svensson · Växjö, SE
Fredrik Jonsson · Bro, SE

Key dates

Filing date	Jun 5, 2013
Grant date	Dec 24, 2013
Priority date	—
Expiry date	Jun 5, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG03F9/7076
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A pattern generator includes: a writing tool and a calibration system. The writing tool is configured to generate a pattern on a workpiece arranged on a stage. The calibration system is configured to determine a correlation between a coordinate system of the writing tool and a coordinate system of a calibration plate on one of the stage and the workpiece. The calibration system is also configured to determine the correlation at least partly based on an optical correlation signal, or pattern, in a form of at least one optical beam being reflected from at least one reflective pattern on the surface of the calibration plate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.