Substrate processing apparatus having electrode member
US8623173B2 · kind B2 · utility
4Cited by
10References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 26, 2008 |
| Grant date | Jan 7, 2014 |
| Priority date | — |
| Expiry date | Jan 7, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67109
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electrode member for generating plasma includes an electrode plate and a cooling unit having a plurality of thermoelectric modules that are thermally in contact with the electrode plate. The thermoelectric modules may regulate the temperature of the electrode plate based on the Peltier effect.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.