Hyoung Kyu SON
11Patents
3h-index
7Co-inventors
49Inventor score
Filing activity: May 15, 2007 → Dec 29, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7988817B2 | Lift pin driving device and a flat panel display manufacturing apparatus having same | Emerging Cross-Sectional Technologies | 37 | Active |
| US8075691B2 | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 6 | Active |
| US8623173B2 | Substrate processing apparatus having electrode member | Electricity | 4 | Active |
| US7770478B2 | Apparatus and method for measuring chuck attachment force | Electricity | 3 | Active |
| US8187384B2 | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 2 | Active |
| US8152926B2 | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 2 | Active |
| US8834673B2 | Process chamber having gate slit opening and closing apparatus | Electricity | 0 | Active |
| US12362148B2 | Apparatus for treating substrate and assembly for distributing gas | Electricity | 0 | Active |
| US11408071B2 | Gas supplying unit of substrate treating apparatus | Chemistry; Metallurgy | 0 | Active |
| US8349082B2 | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
| US7690913B2 | Embossing apparatus and method | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.