Measuring and controlling parameters of a plasma generator
US8624501B2 · kind B2 · utility
48Cited by
6References
31Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 8, 2010 |
| Grant date | Jan 7, 2014 |
| Priority date | — |
| Expiry date | Mar 22, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32174
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Methods, systems, and computer program products are described for measuring and controlling parameters of a plasma generator. A current in a primary winding of a transformer or inductive element that generates a plasma is measured. A voltage across a secondary winding of the transformer or inductive element is measured. Based on the current of the primary winding and the voltage across the secondary winding, a parameter of the plasma is determined. The parameter includes a resistance value associated with the plasma, a power value associated with the plasma, or both.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.