Positioning apparatus, exposure apparatus, and device manufacturing method
US8625077B2 · kind B2 · utility
4Cited by
1References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 4, 2011 |
| Grant date | Jan 7, 2014 |
| Priority date | — |
| Expiry date | Apr 2, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70783
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A positioning apparatus according to the present invention includes: a tabletop having a plane; a plurality of actuators configured to be driven in a direction perpendicular to the plane to move the tabletop; and a control unit configured to measure a frequency response of the tabletop and, when a peak is detected at the resonance frequency of elastic vibration of the tabletop, adjust the thrust distribution ratio for the plurality of actuators to reduce the peak.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.