Gas injector and film deposition apparatus having the same
US8628621B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Dec 27, 2008 |
| Grant date | Jan 14, 2014 |
| Priority date | — |
| Expiry date | Feb 4, 2032 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/26
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Provided are a gas injector and a film deposition apparatus having the same. The gas injector includes a body, a supply hole, an injection hole, and a distribution plate. The body is configured to provide an inner space therein. The supply hole is formed in an upper surface of the body to communicate with the inner space and receive a raw material. The injection hole is formed in a lower surface of the body to communicate with the inner space and inject the raw material. The distribution plate is disposed in the inner space of the body. A through hole is formed in the distribution plate. The distribution plate is disposed to be inclined at a predetermined angle with respect to a horizontal plane. The gas injector can uniformly inject the raw material and improve vaporization efficiency of the raw material having a powder form.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.